LIU, CHANG <br/><br/>
FUNDATIONS OF MEMS 

 - 2ND 
 -  PEARSON EDUCATION, NEW DELHI  2012 
 - 576 
<br/><br/><label>ISBN: </label>978-81-317-6475-6 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical Engineering
<br/><br/><label>Dewey Class. No.: </label> / LIU