LYSHEVSKI, SERGEY EDWARD <br/><br/>
MEMS AND NEMS SYSTEMS DEVICES AND STRUCTURES 

 -  CRC PRESS TAYLOR AND FRANCIS GROUP, BOCA RATON  2010 
 - 461 
<br/><br/><label>ISBN: </label>0-8493-1262-0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics & Communication Eng.
<br/><br/><label>Dewey Class. No.: </label>621.381  / LYS