TY  - BOOK
AU  - LYSHEVSKI, SERGEY EDWARD
TI  - MEMS AND NEMS SYSTEMS DEVICES AND STRUCTURES
SN  - 0-8493-1262-0
U1  - 621.381 
PY  - 2010///
PB  - CRC PRESS TAYLOR AND FRANCIS GROUP, BOCA RATON
KW  - Electronics & Communication Eng
ER  -